Fundamentals of microfabrication and nanotechnology. Volume III, From MEMS to bio-MEMS and bio-NEMS :

Fundamentals of microfabrication and nanotechnology. Volume III, From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications Madou, Marc J. Primary Author mixed material bibliography Boca Raton, FL. CRC Press 2012 en English xiii, 636 pages : illustrations (some color) ; 29 "Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bio-nanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature BioMEMS Nanoelectromechanical systems TECHNOLOGY & ENGINEERING -- Nanotechnology & MEMS 620.5 9781420055160 e-Library Universitas Pertamina Be Global Leader 620.5 MAD f 9020/PUP/2019 Perpustakaan Universitas Pertamina 620.5 MAD f c.1 0745662285_No14_FoMaNV3_170522.jpg.jpg 4733 2022-04-12 12:52:03 2022-05-25 15:33:50 machine generated