APA Style
Madou, Marc J.. (2012).
Fundamentals of microfabrication and nanotechnology. Volume III, From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications (Ed. 3rd).
Boca Raton, FL.:
CRC Press.
Chicago Style
Madou, Marc J..
Fundamentals of microfabrication and nanotechnology. Volume III, From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications.
Ed. 3rd
Boca Raton, FL.:
CRC Press,
2012.
Text.
MLA Style
Madou, Marc J..
Fundamentals of microfabrication and nanotechnology. Volume III, From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications.
Ed. 3rd
Boca Raton, FL.:
CRC Press,
2012.
Text.
Turabian Style
Madou, Marc J..
Fundamentals of microfabrication and nanotechnology. Volume III, From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications.
Ed. 3rd
Boca Raton, FL.:
CRC Press,
2012.
Print.