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Fundamentals of microfabrication and nanotechnology. Volume III, From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications
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"Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bio-nanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature
Availability
| 9020/PUP/2019 | 620.5 MAD f c.1 | Perpustakaan Universitas Pertamina | Available |
Detail Information
| Series Title |
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| Call Number |
620.5 MAD f
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| Publisher | CRC Press : Boca Raton, FL.., 2012 |
| Collation |
xiii, 636 pages : illustrations (some color) ; 29
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| Language |
English
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| ISBN/ISSN |
978-1-4200-5516-0
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| Classification |
620.5
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| Content Type |
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| Carrier Type |
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| Edition |
Ed. 3rd
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| Subject(s) | |
| Specific Detail Info |
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| Statement of Responsibility |
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| Department(s) |
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Other version/related
No other version available
