Manufacturing Techniques And Applications Madou, Marc J. Primary Author mixed material bibliography Boca Raton CRC Press 2012 en English

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xiii, 656 p: illust; 29 cm Designed for science and engineering students, Manufacturing Techniques for Microfabrication and Nanotechnology focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies, detailing those that differ the most from the miniaturization processes used to fashion ICs. Microelectromechanical Systems Nanotechnology Microelectronics Lasers--Industrial Applications Integrated circuits--Design and construction Microfabrication Machining Microelectromechanical systems--Design and construction 620.5 9781420055191 e-Library Universitas Pertamina Be Global Leader 620.5 MAD f 9021/PUP/2019 Perpustakaan Universitas Pertamina 620.5 MAD f c.1 0745662285_No14_FoMaN170522.jpg.jpg 4964 2022-05-17 14:04:51 2022-05-18 16:48:44 machine generated