Volume I,. Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology Madou, Marc J. Primary Author mixed material bibliography Boca Raton CRC Press 2011 en English

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xiii, 641 p. : illust; 29 cm Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. Microelectromechanical Systems Nanotechnology Nanoelectromechanical systems Solid state physics Microfluidics 620.5 9781439895344 e-Library Universitas Pertamina Be Global Leader 620.5 MAD f 9019/PUP/2019 Perpustakaan Universitas Pertamina 620.5 MAD f c.1 0745662285_No14_FoMaNV3170522.jpg.jpg 4965 2022-05-17 14:19:19 2022-05-25 15:35:23 machine generated