APA Style

Madou, Marc J.. (2012). Fundamentals of microfabrication and nanotechnology. Volume III, From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications (Ed. 3rd). Boca Raton, FL.: CRC Press.

Chicago Style

Madou, Marc J.. Fundamentals of microfabrication and nanotechnology. Volume III, From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications. Ed. 3rd Boca Raton, FL.: CRC Press, 2012. Text.

MLA Style

Madou, Marc J.. Fundamentals of microfabrication and nanotechnology. Volume III, From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications. Ed. 3rd Boca Raton, FL.: CRC Press, 2012. Text.

Turabian Style

Madou, Marc J.. Fundamentals of microfabrication and nanotechnology. Volume III, From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications. Ed. 3rd Boca Raton, FL.: CRC Press, 2012. Print.