APA Style

Madou, Marc J.. (2012). Fundamentals Of Microfabrication And Nanotechnology. Volume II, From MEMS To Bio-MEMS And Bio-NEMS : Manufacturing Techniques And Applications (Ed. 3rd). Boca Raton: CRC Press.

Chicago Style

Madou, Marc J.. Fundamentals Of Microfabrication And Nanotechnology. Volume II, From MEMS To Bio-MEMS And Bio-NEMS : Manufacturing Techniques And Applications. Ed. 3rd Boca Raton: CRC Press, 2012. Text.

MLA Style

Madou, Marc J.. Fundamentals Of Microfabrication And Nanotechnology. Volume II, From MEMS To Bio-MEMS And Bio-NEMS : Manufacturing Techniques And Applications. Ed. 3rd Boca Raton: CRC Press, 2012. Text.

Turabian Style

Madou, Marc J.. Fundamentals Of Microfabrication And Nanotechnology. Volume II, From MEMS To Bio-MEMS And Bio-NEMS : Manufacturing Techniques And Applications. Ed. 3rd Boca Raton: CRC Press, 2012. Print.