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Fundamentals of microfabrication and nanotechnology : Volume I,. Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology
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Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal.
Availability
| 9019/PUP/2019 | 620.5 MAD f c.1 | Perpustakaan Universitas Pertamina | Available |
Detail Information
| Series Title |
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| Call Number |
620.5 MAD f
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| Publisher | CRC Press : Boca Raton., 2011 |
| Collation |
xiii, 641 p. : illust; 29 cm
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| Language |
English
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| ISBN/ISSN |
9781439895344
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| Classification |
620.5
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| Content Type |
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| Edition |
Ed. 3rd
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| Specific Detail Info |
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| Statement of Responsibility |
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| Department(s) |
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Other version/related
No other version available
