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Fundamentals of microfabrication and nanotechnology :
Volume I,. Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology
Madou, Marc J.
Primary Author
mixed material
9781439895344
Boca Raton
CRC Press
2011
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Fundamentals Of Microfabrication And Nanotechnology. Volume II, From MEMS To Bio-MEMS And Bio-NEMS :
Manufacturing Techniques And Applications
Madou, Marc J.
Primary Author
mixed material
9781420055191
Boca Raton
CRC Press
2012
0745662285_No14_FoMaN170522.jpg.jpg
Electromechanics and MEMS
Jones, Thomas Byron
Primary Author
Nenadic, Nenad G.
Primary Author
mixed material
9780521764834
New York
Cambridge University
2013
Electromechanics_and_MEMS.jpg.jpg