FABRIKASI LAPIS TIPIS P-TYPE BERBASIS COPPER ALUMINUM OXIDE FASA DELAFOSSITE (CuAlO2) MENGGUNAKAN METODE ULTRASONIC SPRAY PYROLYSIS (USP)

Abstract

Research towards the fabrication of Delafossite copper aluminum oxide (CuAlO2) has been carried out using the ultrasonic spray pyrolysis (USP) method aiming to synthesize the Delafossite copper aluminum oxide (CuAlO2) and to determine the optimal temperature for the formation of Delafossite copper aluminum oxide (CuAlO2) on the surface of quartz glass sample. The method used during this deposition process of thin film is the ultrasonic spray pyrolysis method. The results of the experiment show that the synthesis of the Delafossite copper aluminum oxide (CuAlO2) was successfully carried out with temperature variations of 800 C, 900 C, and 1000 C by observing the surface of thin film sample deposition by ultrasonic spray pyrolysis shows an even surface area. Morphological observations of thin film samples using a Scanning Electron Microscope (SEM) instrument with the magnifications of 1000x, 10000x, and 20000x results that the surface area was evenly distributed on the sample and an X-Ray Diffraction (XRD) results indicate the peak of Delafossite Copper Aluminum Oxide (CuAlO2) are in the crystal plane of (006), (101), (012), (104), (009), (013), (110), and (202).