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Fundamentals of microfabrication and nanotechnology : Volume I,. Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology

Fundamentals of microfabrication and nanotechnology : Volume I,. Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology

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Fundamentals of microfabrication and nanotechnology. Volume III, From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications

Fundamentals of microfabrication and nanotechnology. Volume III, From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications

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